06FC011
Tx: |
6mm |
分辨率0.001mm |
Ty: |
±2mm |
分辨率0.0005mm |
Tz: |
±2mm |
分辨率0.0005mm |
θy: |
±4° |
分辨率5″ |
θz: |
±4° |
分辨率5″ |